{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8501638","patent":{"patent_number":"US-8501638","title":"Laser annealing scanning methods with reduced annealing non-uniformities","assignee":null,"inventors":[],"filing_date":"2012-04-27T00:00:00.000Z","publication_date":"2013-08-06T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":10,"abstract":"Laser annealing scanning methods that result in reduced annealing non-uniformities in semiconductor device structures under fabrication are disclosed. The methods include defining a length of an annealing laser beam such that the tails of the laser beam resided only within scribe lines that separate the semiconductor device structures. The annealing laser beam tails from adjacent scan path segments can overlap or not overlap within the scribe lines. The cross-scan length of the annealing laser beam can be selected to simultaneously scan more than one semiconductor device structure, as long as annealing laser beam is configured such that the tails do not fall within a semiconductor device structure."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Laser annealing scanning methods with reduced annealing non-uniformities","description":"Laser annealing scanning methods that result in reduced annealing non-uniformities in semiconductor device structures under fabrication are disclosed. The methods include defining a length of an annea","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8501638","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8501638","citation_suggestion":"Patentable. \"Laser annealing scanning methods with reduced annealing non-uniformities\" (US-8501638). https://patentable.app/patents/US-8501638","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8501638","json":"https://patentable.app/api/llm-context/US-8501638","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T09:42:13.741Z"}