{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8502279","patent":{"patent_number":"US-8502279","title":"Nano-electro-mechanical system (NEMS) structures with actuatable semiconductor fin on bulk substrates","assignee":null,"inventors":[],"filing_date":"2011-05-16T00:00:00.000Z","publication_date":"2013-08-06T00:00:00.000Z","cpc_codes":["B82Y","G11C","G11C","H01L","G11C"],"num_claims":21,"abstract":"Semiconductor devices are formed with a nano-electro-mechanical system (NEMS) logic or memory on a bulk substrate. Embodiments include forming source/drain regions directly on a bulk substrate, forming a fin connecting the source/drain regions, forming two gates, one on each side of the fin, the two gates being insulated from the bulk substrate, and forming a substrate gate in the bulk substrate. The fin is separated from each of the two gates and the substrate gate with an air gap."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Nano-electro-mechanical system (NEMS) structures with actuatable semiconductor fin on bulk substrates","description":"Semiconductor devices are formed with a nano-electro-mechanical system (NEMS) logic or memory on a bulk substrate. Embodiments include forming source/drain regions directly on a bulk substrate, formin","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8502279","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8502279","citation_suggestion":"Patentable. \"Nano-electro-mechanical system (NEMS) structures with actuatable semiconductor fin on bulk substrates\" (US-8502279). https://patentable.app/patents/US-8502279","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8502279","json":"https://patentable.app/api/llm-context/US-8502279","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T13:41:37.435Z"}