{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8502958","patent":{"patent_number":"US-8502958","title":"Positioning device, lithographic apparatus using same, and device manufacturing method","assignee":null,"inventors":[],"filing_date":"2010-06-01T00:00:00.000Z","publication_date":"2013-08-06T00:00:00.000Z","cpc_codes":["G05B","G05B"],"num_claims":9,"abstract":"The present invention provides a positioning device for positioning a table, including a base, a motor that drives the table in the driving area on the base, a position sensor that detects the position of the table, and a control unit that controls the motor. The control unit includes a first output unit that outputs electric current for controlling the position of the table based on the output of the position sensor; a second output unit that outputs electric current for imparting a thrust force, which is directed toward the center of the driving area, to the table; and a switch unit that switches from a state in which the motor is controlled depending on the output of the first output unit to a state in which the motor is controlled depending on the output of the second output unit, based on a stopping signal for stopping the table."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Positioning device, lithographic apparatus using same, and device manufacturing method","description":"The present invention provides a positioning device for positioning a table, including a base, a motor that drives the table in the driving area on the base, a position sensor that detects the positio","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8502958","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8502958","citation_suggestion":"Patentable. \"Positioning device, lithographic apparatus using same, and device manufacturing method\" (US-8502958). https://patentable.app/patents/US-8502958","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8502958","json":"https://patentable.app/api/llm-context/US-8502958","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T16:46:37.272Z"}