{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8503701","patent":{"patent_number":"US-8503701","title":"Optical sensing in a directional MEMS microphone","assignee":null,"inventors":[],"filing_date":"2010-10-25T00:00:00.000Z","publication_date":"2013-08-06T00:00:00.000Z","cpc_codes":["H04R","H04R","H04R"],"num_claims":20,"abstract":"A microphone having an optical component for converting the sound-induced motion of the diaphragm into an electronic signal using a diffraction grating. The microphone with inter-digitated fingers is fabricated on a silicon substrate using a combination of surface and bulk micromachining techniques. A 1 mm×2 mm microphone diaphragm, made of polysilicon, has stiffeners and hinge supports to ensure that it responds like a rigid body on flexible hinges. The diaphragm is designed to respond to pressure gradients, giving it a first order directional response to incident sound. This mechanical structure is integrated with a compact optoelectronic readout system that displays results based on optical interferometry."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Optical sensing in a directional MEMS microphone","description":"A microphone having an optical component for converting the sound-induced motion of the diaphragm into an electronic signal using a diffraction grating. The microphone with inter-digitated fingers is ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8503701","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8503701","citation_suggestion":"Patentable. \"Optical sensing in a directional MEMS microphone\" (US-8503701). https://patentable.app/patents/US-8503701","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8503701","json":"https://patentable.app/api/llm-context/US-8503701","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T22:14:28.342Z"}