{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8504951","patent":{"patent_number":"US-8504951","title":"Dose-data generating apparatus, dose-data generating method, and manufacturing method of semiconductor device","assignee":null,"inventors":[],"filing_date":"2011-06-24T00:00:00.000Z","publication_date":"2013-08-06T00:00:00.000Z","cpc_codes":["G06F","H01L"],"num_claims":8,"abstract":"According to one embodiment, generating virtual data by mirroring data based on a dimension measurement result in a measurement region on an inner side of a shot region to a non-shot region on an outer side of a shot edge, and calculating dose data of the measurement region and a non-measurement region based on data in the measurement region and the virtual data are included."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Dose-data generating apparatus, dose-data generating method, and manufacturing method of semiconductor device","description":"According to one embodiment, generating virtual data by mirroring data based on a dimension measurement result in a measurement region on an inner side of a shot region to a non-shot region on an oute","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8504951","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8504951","citation_suggestion":"Patentable. \"Dose-data generating apparatus, dose-data generating method, and manufacturing method of semiconductor device\" (US-8504951). https://patentable.app/patents/US-8504951","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8504951","json":"https://patentable.app/api/llm-context/US-8504951","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T21:00:18.940Z"}