{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8506712","patent":{"patent_number":"US-8506712","title":"Wafer support jig, vertical heat treatment boat including wafer support jig, and method for manufacturing wafer support jig","assignee":null,"inventors":[],"filing_date":"2008-04-14T00:00:00.000Z","publication_date":"2013-08-13T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":4,"abstract":"The present invention provides a wafer support jig having at least a support surface on which a treatment target wafer is mounted and supported when performing a heat treatment, wherein skewness Rsk on the support surface that supports the treatment target wafer is 0<Rsk<10, and 100 to 105 protruding objects each having a height of 2 μm or above and less than 30 μm are present within arbitrary 1 mm2 without protruding objects each having a height of 30 μm or above on the entire support surface. As a result, it is provided a wafer support jig that can reduce friction or adhesion of a support surface of the wafer support jig and the wafer when performing a heat treatment to the treatment target wafer such as a semiconductor wafer in a vertical heat treatment furnace, has an appropriate size distribution of the protruding objects on the support surface, and can suppress occurrence of slip dislocation, and to provide a vertical heat treatment boat including this wafer support jig, and a method for manufacturing the wafer support jig."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Wafer support jig, vertical heat treatment boat including wafer support jig, and method for manufacturing wafer support jig","description":"The present invention provides a wafer support jig having at least a support surface on which a treatment target wafer is mounted and supported when performing a heat treatment, wherein skewness Rsk o","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8506712","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8506712","citation_suggestion":"Patentable. \"Wafer support jig, vertical heat treatment boat including wafer support jig, and method for manufacturing wafer support jig\" (US-8506712). https://patentable.app/patents/US-8506712","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8506712","json":"https://patentable.app/api/llm-context/US-8506712","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T22:36:16.748Z"}