{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8506831","patent":{"patent_number":"US-8506831","title":"Combination, method, and composition for chemical mechanical planarization of a tungsten-containing substrate","assignee":null,"inventors":[],"filing_date":"2009-12-03T00:00:00.000Z","publication_date":"2013-08-13T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":8,"abstract":"A combination, composition and associated method for chemical mechanical planarization of a tungsten-containing substrate are described herein which afford tunability of tungsten/dielectric selectivity and low selectivity for tungsten removal in relation to dielectric material. Removal rates for both tungsten and dielectric are high and stability of the slurry (e.g., with respect to pH drift over time) is high."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Combination, method, and composition for chemical mechanical planarization of a tungsten-containing substrate","description":"A combination, composition and associated method for chemical mechanical planarization of a tungsten-containing substrate are described herein which afford tunability of tungsten/dielectric selectivit","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8506831","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8506831","citation_suggestion":"Patentable. \"Combination, method, and composition for chemical mechanical planarization of a tungsten-containing substrate\" (US-8506831). https://patentable.app/patents/US-8506831","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8506831","json":"https://patentable.app/api/llm-context/US-8506831","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T14:09:21.733Z"}