{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8507858","patent":{"patent_number":"US-8507858","title":"Pattern measurement apparatus and pattern measurement method","assignee":null,"inventors":[],"filing_date":"2012-10-15T00:00:00.000Z","publication_date":"2013-08-13T00:00:00.000Z","cpc_codes":["G01N","G01N"],"num_claims":16,"abstract":"Referring to design data for a sample, a measurement region is defined at a portion in the design data which has no step in an edge of a pattern. In addition, an edge as a characteristic portion is detected from the design data, and an edge as a characteristic portion corresponding to the characteristic portion of the design data is detected from a secondary electron image. Then, the measurement region is positioned and located in a secondary electron image based on a positional relationship between the edge of the design data and the edge of the secondary electron image. A width of the pattern is measured on the basis of a distance between the two edges included in the measurement region thus located."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Pattern measurement apparatus and pattern measurement method","description":"Referring to design data for a sample, a measurement region is defined at a portion in the design data which has no step in an edge of a pattern. In addition, an edge as a characteristic portion is de","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8507858","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8507858","citation_suggestion":"Patentable. \"Pattern measurement apparatus and pattern measurement method\" (US-8507858). https://patentable.app/patents/US-8507858","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8507858","json":"https://patentable.app/api/llm-context/US-8507858","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T19:16:21.729Z"}