{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8507916","patent":{"patent_number":"US-8507916","title":"Thin film transistor substrate, LCD device including the same, and method for manufacturing thin film transistor substrate","assignee":null,"inventors":[],"filing_date":"2011-05-16T00:00:00.000Z","publication_date":"2013-08-13T00:00:00.000Z","cpc_codes":["G02F","G02F","H01L","H01L"],"num_claims":12,"abstract":"A source electrode and a drain electrode are formed by a stack of a titanium layer, a molybdenum nitride layer, an aluminum layer, and a molybdenum nitride layer, the titanium layer is formed by dry etching, and an oxide semiconductor layer is formed by performing annealing in an oxygen-containing atmosphere after formation of the source electrode and the drain electrode."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Thin film transistor substrate, LCD device including the same, and method for manufacturing thin film transistor substrate","description":"A source electrode and a drain electrode are formed by a stack of a titanium layer, a molybdenum nitride layer, an aluminum layer, and a molybdenum nitride layer, the titanium layer is formed by dry e","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8507916","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8507916","citation_suggestion":"Patentable. \"Thin film transistor substrate, LCD device including the same, and method for manufacturing thin film transistor substrate\" (US-8507916). https://patentable.app/patents/US-8507916","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8507916","json":"https://patentable.app/api/llm-context/US-8507916","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T15:36:08.751Z"}