{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8509516","patent":{"patent_number":"US-8509516","title":"Circuit pattern examining apparatus and circuit pattern examining method","assignee":null,"inventors":[],"filing_date":"2009-07-13T00:00:00.000Z","publication_date":"2013-08-13T00:00:00.000Z","cpc_codes":["G01N","G01N","G06T","G06T","G06T","H01L"],"num_claims":13,"abstract":"Provided is an examination technique to detect defects with high sensitivity at an outer-most repetitive portion of a memory mat of a semiconductor device and even in a peripheral circuit having no repetitiveness.A circuit pattern inspection apparatus comprises an image detection unit for acquiring an image of a circuit pattern composed of multiple die having a repetitive pattern, a defect judgment unit which composes, in respect of an acquired detected image, reference images by switching addition objectives depending on regions of repetitive pattern and the other regions and compares a composed reference image with the detected image to detect a defect, and a display unit for displaying the image of the detected defect."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Circuit pattern examining apparatus and circuit pattern examining method","description":"Provided is an examination technique to detect defects with high sensitivity at an outer-most repetitive portion of a memory mat of a semiconductor device and even in a peripheral circuit having no re","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8509516","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8509516","citation_suggestion":"Patentable. \"Circuit pattern examining apparatus and circuit pattern examining method\" (US-8509516). https://patentable.app/patents/US-8509516","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8509516","json":"https://patentable.app/api/llm-context/US-8509516","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T18:35:34.071Z"}