{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8513578","patent":{"patent_number":"US-8513578","title":"Electromagnetic wave processing apparatus","assignee":null,"inventors":[],"filing_date":"2011-05-17T00:00:00.000Z","publication_date":"2013-08-20T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":15,"abstract":"A processing apparatus using an electromagnetic wave is provided to perform a heat treatment on a target object. The processing apparatus includes a metallic processing chamber; a loading/unloading opening provided in one end of the processing chamber; a closing body capable of closing and opening the loading/unloading opening; a holding unit loaded and unloaded into and from the inside of the processing chamber through the loading/unloading opening, holding target objects at a predetermined interval, the holding unit being made of a material allowing the electromagnetic wave to transmit therethrough; an electromagnetic wave supply unit for introducing the electromagnetic wave into the processing chamber; a gas introducing unit for introducing a gas into the processing chamber; and a gas exhaust unit for exhausting an atmosphere in the processing chamber."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Electromagnetic wave processing apparatus","description":"A processing apparatus using an electromagnetic wave is provided to perform a heat treatment on a target object. The processing apparatus includes a metallic processing chamber; a loading/unloading op","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8513578","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8513578","citation_suggestion":"Patentable. \"Electromagnetic wave processing apparatus\" (US-8513578). https://patentable.app/patents/US-8513578","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8513578","json":"https://patentable.app/api/llm-context/US-8513578","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T19:15:29.639Z"}