{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8513959","patent":{"patent_number":"US-8513959","title":"Integrated sensor system","assignee":null,"inventors":[],"filing_date":"2010-12-23T00:00:00.000Z","publication_date":"2013-08-20T00:00:00.000Z","cpc_codes":["G01D","G01D"],"num_claims":22,"abstract":"An integrated sensory system for a lithography machine with a projection lens system (132) for focusing one or more exposure beams onto a target, a moveable table (134) for carrying the target (9), a capacitive sensing system (300) for making a measurement related to a distance between a final focusing element of the projection lens system (104) and a surface of a target (9), and a control unit (400) for controlling movement of the moveable table (134) to adjust a position of the target (9) based at least in part on a signal from the capacitive sensing system. The capacitive sensing system (300) has a plurality of capacitive sensors (30), each having a thin film structure. The capacitive sensors and the final focusing element (104) of the projection lens system are mounted directly to a common base (112), and the sensors are located in close proximity to an edge of the final focusing element of the projection lens system."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Integrated sensor system","description":"An integrated sensory system for a lithography machine with a projection lens system (132) for focusing one or more exposure beams onto a target, a moveable table (134) for carrying the target (9), a ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8513959","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8513959","citation_suggestion":"Patentable. \"Integrated sensor system\" (US-8513959). https://patentable.app/patents/US-8513959","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8513959","json":"https://patentable.app/api/llm-context/US-8513959","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T19:35:48.892Z"}