{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8516405","patent":{"patent_number":"US-8516405","title":"System and method for lithography simulation","assignee":null,"inventors":[],"filing_date":"2012-06-26T00:00:00.000Z","publication_date":"2013-08-20T00:00:00.000Z","cpc_codes":["G06F","G06F","G06T","G06F","G06F","G06T"],"num_claims":17,"abstract":"In one aspect, the present invention is directed to a technique of, and system for simulating, verifying, inspecting, characterizing, determining and/or evaluating the lithographic designs, techniques and/or systems, and/or individual functions performed thereby or components used therein. In one embodiment, the present invention is a system and method that accelerates lithography simulation, inspection, characterization and/or evaluation of the optical characteristics and/or properties, as well as the effects and/or interactions of lithographic systems and processing techniques."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"System and method for lithography simulation","description":"In one aspect, the present invention is directed to a technique of, and system for simulating, verifying, inspecting, characterizing, determining and/or evaluating the lithographic designs, techniques","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8516405","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8516405","citation_suggestion":"Patentable. \"System and method for lithography simulation\" (US-8516405). https://patentable.app/patents/US-8516405","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8516405","json":"https://patentable.app/api/llm-context/US-8516405","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T14:46:18.984Z"}