{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8517363","patent":{"patent_number":"US-8517363","title":"XY stage device, semiconductor inspection apparatus, and semiconductor exposure apparatus","assignee":null,"inventors":[],"filing_date":"2010-03-17T00:00:00.000Z","publication_date":"2013-08-27T00:00:00.000Z","cpc_codes":["B23Q","H01L"],"num_claims":8,"abstract":"An XY stage device having an X-axis movable body which moves in the X-axis direction on a platen, and a Y-axis movable body which moves in the Y-axis direction on the platen and guides the movement of the X-axis movable body in the X-axis direction. The XY stage device includes a pair of actuators which can be provided so as to be separated from each other in the X-axis direction, and drives the Y-axis movable body in the Y-axis direction, a detector which detects the yawing angle that can be the angle of the Y-axis movable body in a rotational direction around the Z-axis, a controller which controls the driving of the pair of actuators on the basis of the yawing angle detected by the detector, and a pair of supporters which supports the Y-axis movable body on the platen. One of the pair of supporters can be a rolling guide which guides the movement of the Y-axis movable body in the Y-axis direction, and the other of the pair of supporters can be an air pad which supports the Y-axis movable body in non-contact with the platen."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"XY stage device, semiconductor inspection apparatus, and semiconductor exposure apparatus","description":"An XY stage device having an X-axis movable body which moves in the X-axis direction on a platen, and a Y-axis movable body which moves in the Y-axis direction on the platen and guides the movement of","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8517363","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8517363","citation_suggestion":"Patentable. \"XY stage device, semiconductor inspection apparatus, and semiconductor exposure apparatus\" (US-8517363). https://patentable.app/patents/US-8517363","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8517363","json":"https://patentable.app/api/llm-context/US-8517363","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T19:52:17.714Z"}