{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8518187","patent":{"patent_number":"US-8518187","title":"Transfer pick cleaning method","assignee":null,"inventors":[],"filing_date":"2012-02-16T00:00:00.000Z","publication_date":"2013-08-27T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":19,"abstract":"A transfer pick provided at a leading end of a transfer arm of a transfer device for transferring a substrate includes a substrate support surface for supporting the substrate thereon; a plurality of contact members protruded from the substrate support surface to contact with the substrate; and a voltage applying unit for charging the contact members with electricity. Further, the transfer pick has a self-cleaning function of removing particles adhered to the contact members by using repulsive force of an electric charge. In addition, a computer readable memory medium storing a computer executable control program, wherein the control program controls a substrate processing apparatus to perform the transfer pick cleaning method."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Transfer pick cleaning method","description":"A transfer pick provided at a leading end of a transfer arm of a transfer device for transferring a substrate includes a substrate support surface for supporting the substrate thereon; a plurality of ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8518187","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8518187","citation_suggestion":"Patentable. \"Transfer pick cleaning method\" (US-8518187). https://patentable.app/patents/US-8518187","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8518187","json":"https://patentable.app/api/llm-context/US-8518187","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T13:14:36.015Z"}