{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8518732","patent":{"patent_number":"US-8518732","title":"Method of providing a semiconductor structure with forming a sacrificial structure","assignee":null,"inventors":[],"filing_date":"2010-12-22T00:00:00.000Z","publication_date":"2013-08-27T00:00:00.000Z","cpc_codes":["H04R","H04R","H04R"],"num_claims":14,"abstract":"A method for providing a semiconductor structure includes forming a sacrificial structure by etching a plurality of trenches from a first main surface of a substrate. The method further includes covering the plurality of trenches at the first main surface with a cover material to define cavities within the substrate, removing a part of the substrate from a second main surface opposite to the first main surface to a depth at which the plurality of trenches are present, and etching away the sacrificial structure from the second main surface of the substrate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of providing a semiconductor structure with forming a sacrificial structure","description":"A method for providing a semiconductor structure includes forming a sacrificial structure by etching a plurality of trenches from a first main surface of a substrate. The method further includes cover","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8518732","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8518732","citation_suggestion":"Patentable. \"Method of providing a semiconductor structure with forming a sacrificial structure\" (US-8518732). https://patentable.app/patents/US-8518732","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8518732","json":"https://patentable.app/api/llm-context/US-8518732","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T07:44:41.483Z"}