{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8524519","patent":{"patent_number":"US-8524519","title":"MEMS microphone device and method for making same","assignee":null,"inventors":[],"filing_date":"2011-07-06T00:00:00.000Z","publication_date":"2013-09-03T00:00:00.000Z","cpc_codes":["H04R","H04R"],"num_claims":10,"abstract":"The present invention discloses a MEMS microphone device and its manufacturing method. The MEMS microphone device includes: a substrate including a first cavity; a MEMS device region above the substrate, wherein the MEMS device region includes a metal layer, a via layer, an insulating material region and a second cavity; a mask layer above the MEMS device region; a first lid having at least one opening communicating with the second cavity, the first lid being fixed above the mask layer; and a second lid fixed under the substrate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"MEMS microphone device and method for making same","description":"The present invention discloses a MEMS microphone device and its manufacturing method. The MEMS microphone device includes: a substrate including a first cavity; a MEMS device region above the substra","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8524519","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8524519","citation_suggestion":"Patentable. \"MEMS microphone device and method for making same\" (US-8524519). https://patentable.app/patents/US-8524519","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8524519","json":"https://patentable.app/api/llm-context/US-8524519","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:02:03.665Z"}