{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8524605","patent":{"patent_number":"US-8524605","title":"Fabrication and mask design methods using spatial frequency sextupling technique","assignee":null,"inventors":[],"filing_date":"2012-04-16T00:00:00.000Z","publication_date":"2013-09-03T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":11,"abstract":"Self-aligned sextuple patterning (SASP) processes and mask design methods for the semiconductor manufacturing are invented. The inventions pertain to methods of forming one and/or two dimensional features on a substrate having the feature density increased to six times of what is possible using the standard optical lithographic technique; and methods to release the overlay requirement when patterning the critical layers of semiconductor devices. Our inventions provide production-worthy methods for the semiconductor industry to continue device scaling beyond 15 nm (half pitch)."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Fabrication and mask design methods using spatial frequency sextupling technique","description":"Self-aligned sextuple patterning (SASP) processes and mask design methods for the semiconductor manufacturing are invented. The inventions pertain to methods of forming one and/or two dimensional feat","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8524605","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8524605","citation_suggestion":"Patentable. \"Fabrication and mask design methods using spatial frequency sextupling technique\" (US-8524605). https://patentable.app/patents/US-8524605","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8524605","json":"https://patentable.app/api/llm-context/US-8524605","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T12:20:07.655Z"}