{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8525994","patent":{"patent_number":"US-8525994","title":"Periodic patterns and technique to control misaligment between two layers","assignee":null,"inventors":[],"filing_date":"2009-04-22T00:00:00.000Z","publication_date":"2013-09-03T00:00:00.000Z","cpc_codes":["G01N","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":8,"abstract":"A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Periodic patterns and technique to control misaligment between two layers","description":"A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radi","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8525994","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8525994","citation_suggestion":"Patentable. \"Periodic patterns and technique to control misaligment between two layers\" (US-8525994). https://patentable.app/patents/US-8525994","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8525994","json":"https://patentable.app/api/llm-context/US-8525994","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:05:21.400Z"}