{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8527081","patent":{"patent_number":"US-8527081","title":"Method and apparatus for automated validation of semiconductor process recipes","assignee":null,"inventors":[],"filing_date":"2011-03-10T00:00:00.000Z","publication_date":"2013-09-03T00:00:00.000Z","cpc_codes":["G06N"],"num_claims":20,"abstract":"Methods and apparatus for automated validation of semiconductor process steps are provided herein. In some examples, a method for validating a semiconductor process recipe includes: selecting a rule set describing an operating window for a semiconductor process tool; checking parameter values defined by steps in the semiconductor process recipe against limit-checking rules of the rule set to produce first results; determining step types from the steps in the semiconductor process recipe using step definition rules of the rule set to produce second results; checking transitions between the step types against step transition rules of the rule set to produce third results; and generating, using the computer, validation data for use of the semiconductor process recipe with the semiconductor process tool based on the first, the second, and the third results."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method and apparatus for automated validation of semiconductor process recipes","description":"Methods and apparatus for automated validation of semiconductor process steps are provided herein. In some examples, a method for validating a semiconductor process recipe includes: selecting a rule s","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8527081","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8527081","citation_suggestion":"Patentable. \"Method and apparatus for automated validation of semiconductor process recipes\" (US-8527081). https://patentable.app/patents/US-8527081","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8527081","json":"https://patentable.app/api/llm-context/US-8527081","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T11:54:55.273Z"}