{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8532364","patent":{"patent_number":"US-8532364","title":"Apparatus and method for detecting defects in wafer manufacturing","assignee":null,"inventors":[],"filing_date":"2010-02-11T00:00:00.000Z","publication_date":"2013-09-10T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N"],"num_claims":16,"abstract":"Apparatus for inspecting a semiconductor wafer (8) has a plurality of light sensors (2) arranged relative to a light source (1) and wafer inspection platform (4), so that images of different angle views of a surface of the wafer can be received and compared with corresponding images taken of a reference wafer to automatically detect defects based on image comparison. The light sensors (2) may receive superposed images of light (7) reflected directly from the light source (1) off the wafer surface and light (6) indirectly reflected off the wafer surface after first reflecting off a dome (3) with a diffusely reflecting inner surface (5) positioned over the platform (4)."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus and method for detecting defects in wafer manufacturing","description":"Apparatus for inspecting a semiconductor wafer (8) has a plurality of light sensors (2) arranged relative to a light source (1) and wafer inspection platform (4), so that images of different angle vie","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8532364","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8532364","citation_suggestion":"Patentable. \"Apparatus and method for detecting defects in wafer manufacturing\" (US-8532364). https://patentable.app/patents/US-8532364","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8532364","json":"https://patentable.app/api/llm-context/US-8532364","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T18:52:16.038Z"}