{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8535550","patent":{"patent_number":"US-8535550","title":"Shape simulation apparatus, shape simulation program, semiconductor production apparatus, and semiconductor device production method","assignee":null,"inventors":[],"filing_date":"2010-08-17T00:00:00.000Z","publication_date":"2013-09-17T00:00:00.000Z","cpc_codes":["G06F","H01L","H01L"],"num_claims":12,"abstract":"Disclosed herein is a shape simulation apparatus including: a flux computation block configured to compute the flux of particles incident on the surface of a wafer covered with a mask; and a shape computation block configured to compute a surface shape of the wafer by allowing the coordinates of a plurality of calculation points established on the surface of the wafer to be time-evolved based on the incident flux computed."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Shape simulation apparatus, shape simulation program, semiconductor production apparatus, and semiconductor device production method","description":"Disclosed herein is a shape simulation apparatus including: a flux computation block configured to compute the flux of particles incident on the surface of a wafer covered with a mask; and a shape com","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8535550","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8535550","citation_suggestion":"Patentable. \"Shape simulation apparatus, shape simulation program, semiconductor production apparatus, and semiconductor device production method\" (US-8535550). https://patentable.app/patents/US-8535550","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8535550","json":"https://patentable.app/api/llm-context/US-8535550","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T09:15:41.092Z"}