{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8535966","patent":{"patent_number":"US-8535966","title":"Horizontal coplanar switches and methods of manufacture","assignee":null,"inventors":[],"filing_date":"2010-07-27T00:00:00.000Z","publication_date":"2013-09-17T00:00:00.000Z","cpc_codes":["G06F"],"num_claims":18,"abstract":"A MEMS structure and methods of manufacture. The method includes forming a sacrificial metal layer at a same level as a wiring layer, in a first dielectric material. The method further includes forming a metal switch at a same level as another wiring layer, in a second dielectric material. The method further includes providing at least one vent to expose the sacrificial metal layer. The method further includes removing the sacrificial metal layer to form a planar cavity, suspending the metal switch. The method further includes capping the at least one vent to hermetically seal the planar cavity."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Horizontal coplanar switches and methods of manufacture","description":"A MEMS structure and methods of manufacture. The method includes forming a sacrificial metal layer at a same level as a wiring layer, in a first dielectric material. The method further includes formin","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8535966","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8535966","citation_suggestion":"Patentable. \"Horizontal coplanar switches and methods of manufacture\" (US-8535966). https://patentable.app/patents/US-8535966","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8535966","json":"https://patentable.app/api/llm-context/US-8535966","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T20:31:44.158Z"}