{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8535998","patent":{"patent_number":"US-8535998","title":"Method for fabricating a gate structure","assignee":null,"inventors":[],"filing_date":"2010-03-09T00:00:00.000Z","publication_date":"2013-09-17T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":19,"abstract":"The present disclosure discloses an exemplary method for fabricating a gate structure comprising depositing and patterning a dummy oxide layer and a dummy gate electrode layer on a substrate; surrounding the dummy oxide layer and the dummy gate electrode layer with a sacrificial layer; surrounding the sacrificial layer with a nitrogen-containing dielectric layer; surrounding the nitrogen-containing dielectric layer with an interlayer dielectric layer; removing the dummy gate electrode layer; removing the dummy oxide layer; removing the sacrificial layer to form an opening in the nitrogen-containing dielectric layer; and depositing a gate dielectric; and depositing a gate electrode."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for fabricating a gate structure","description":"The present disclosure discloses an exemplary method for fabricating a gate structure comprising depositing and patterning a dummy oxide layer and a dummy gate electrode layer on a substrate; surround","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8535998","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8535998","citation_suggestion":"Patentable. \"Method for fabricating a gate structure\" (US-8535998). https://patentable.app/patents/US-8535998","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8535998","json":"https://patentable.app/api/llm-context/US-8535998","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T11:13:10.592Z"}