{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8536666","patent":{"patent_number":"US-8536666","title":"Silicon microphone with integrated back side cavity","assignee":null,"inventors":[],"filing_date":"2012-11-06T00:00:00.000Z","publication_date":"2013-09-17T00:00:00.000Z","cpc_codes":["H04R","H04R","H04R"],"num_claims":7,"abstract":"An integrated circuit containing a capacitive microphone with a back side cavity located within the substrate of the integrated circuit. Access holes may be formed through a dielectric support layer at the surface of the substrate to provide access for etchants to the substrate to form the back side cavity. The back side cavity may be etched after a fixed plate and permeable membrane of the capacitive microphone are formed by providing etchants through the permeable membrane and through the access holes to the substrate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Silicon microphone with integrated back side cavity","description":"An integrated circuit containing a capacitive microphone with a back side cavity located within the substrate of the integrated circuit. Access holes may be formed through a dielectric support layer a","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8536666","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8536666","citation_suggestion":"Patentable. \"Silicon microphone with integrated back side cavity\" (US-8536666). https://patentable.app/patents/US-8536666","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8536666","json":"https://patentable.app/api/llm-context/US-8536666","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T17:06:29.446Z"}