{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8538168","patent":{"patent_number":"US-8538168","title":"Image pattern matching systems and methods for wafer alignment","assignee":null,"inventors":[],"filing_date":"2010-08-11T00:00:00.000Z","publication_date":"2013-09-17T00:00:00.000Z","cpc_codes":["G06T","G06V","G06T","G06T"],"num_claims":24,"abstract":"A computer-implemented image pattern matching method for wafer alignment is provided, for determining an overall similarity value and an overall geometry relationship between a target wafer image and a model wafer image. The method includes: determining a plurality of model patterns in the model wafer image; searching the target wafer image to identify a plurality of target patterns, thereby generating a plurality of matches each including a respective target pattern and model pattern; selecting, using multiple threshold values, ones of the plurality of matches according to a plurality of similarity values; and determining, using a predetermined algorithm and the selected ones of the matches, the overall similarity value and the overall geometry relationship between the target wafer image and the model wafer image."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Image pattern matching systems and methods for wafer alignment","description":"A computer-implemented image pattern matching method for wafer alignment is provided, for determining an overall similarity value and an overall geometry relationship between a target wafer image and ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8538168","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8538168","citation_suggestion":"Patentable. \"Image pattern matching systems and methods for wafer alignment\" (US-8538168). https://patentable.app/patents/US-8538168","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8538168","json":"https://patentable.app/api/llm-context/US-8538168","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T12:36:46.857Z"}