{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8538571","patent":{"patent_number":"US-8538571","title":"Substrate processing system, group managing apparatus, and method of analyzing abnormal state","assignee":null,"inventors":[],"filing_date":"2010-09-17T00:00:00.000Z","publication_date":"2013-09-17T00:00:00.000Z","cpc_codes":["G05B","G05B"],"num_claims":11,"abstract":"A maintenance engineer can analyze an abnormal state with less difficulty in a rapid and correct manner independent of his/her skill. A substrate processing system comprises: a substrate processing apparatus configured to operate according to a recipe defining a process sequence and process conditions, and a group managing apparatus connected to the substrate processing apparatus. The group managing apparatus comprises an analysis support unit. The analysis support unit is configured to extract check item information relating to both abnormal state information for indentifying an abnormal state occurring when the recipe is executed and apparatus type information for identifying the type of the substrate processing apparatus at which the abnormal state occurs, and to prepare a check item table comprising the extracted check item information."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate processing system, group managing apparatus, and method of analyzing abnormal state","description":"A maintenance engineer can analyze an abnormal state with less difficulty in a rapid and correct manner independent of his/her skill. A substrate processing system comprises: a substrate processing ap","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8538571","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8538571","citation_suggestion":"Patentable. \"Substrate processing system, group managing apparatus, and method of analyzing abnormal state\" (US-8538571). https://patentable.app/patents/US-8538571","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8538571","json":"https://patentable.app/api/llm-context/US-8538571","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-30T09:15:58.893Z"}