{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-8541163","patent":{"patent_number":"US-8541163","title":"Transporting method, transporting apparatus, exposure method, and exposure apparatus","assignee":null,"inventors":[],"filing_date":"2010-04-29T00:00:00.000Z","publication_date":"2013-09-24T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":5,"abstract":"A ladder type stage apparatus that transports a film-shaped substrate includes a plurality of rods whose longitudinal directions are aligned in a direction that is orthogonal to the moving direction of the film-shaped substrate in order to support the film-shaped substrate; chains that join the rods along a closed-loop trajectory; and a drive motor that moves the rods along this loop-shaped trajectory via the chains."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Transporting method, transporting apparatus, exposure method, and exposure apparatus","description":"A ladder type stage apparatus that transports a film-shaped substrate includes a plurality of rods whose longitudinal directions are aligned in a direction that is orthogonal to the moving direction o","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-8541163","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-8541163","citation_suggestion":"Patentable. \"Transporting method, transporting apparatus, exposure method, and exposure apparatus\" (US-8541163). https://patentable.app/patents/US-8541163","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-8541163","json":"https://patentable.app/api/llm-context/US-8541163","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-05-31T05:04:12.273Z"}