{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9588505","patent":{"patent_number":"US-9588505","title":"Near non-adaptive virtual metrology and chamber control","assignee":null,"inventors":[],"filing_date":"2013-04-25T00:00:00.000Z","publication_date":"2017-03-07T00:00:00.000Z","cpc_codes":["G05B"],"num_claims":20,"abstract":"Embodiments of the present invention relate to a method for a near non-adaptive virtual metrology for wafer processing control. In accordance with an embodiment of the present invention, a method for processing control comprises diagnosing a chamber of a processing tool that processes a wafer to identify a key chamber parameter, and controlling the chamber based on the key chamber parameter if the key chamber parameter can be controlled, or compensating a prediction model by changing to a secondary prediction model if the key chamber parameter cannot be sufficiently controlled."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Near non-adaptive virtual metrology and chamber control","description":"Embodiments of the present invention relate to a method for a near non-adaptive virtual metrology for wafer processing control. In accordance with an embodiment of the present invention, a method for ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9588505","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9588505","citation_suggestion":"Patentable. \"Near non-adaptive virtual metrology and chamber control\" (US-9588505). https://patentable.app/patents/US-9588505","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9588505","json":"https://patentable.app/api/llm-context/US-9588505","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:21:45.965Z"}