{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9589086","patent":{"patent_number":"US-9589086","title":"Method for measuring and analyzing surface structure of chip or wafer","assignee":null,"inventors":[],"filing_date":"2014-01-27T00:00:00.000Z","publication_date":"2017-03-07T00:00:00.000Z","cpc_codes":["G06F"],"num_claims":25,"abstract":"A method for measuring a surface structure of a chip or a wafer is provided that includes obtaining an image of the surface structure of the chip, and then performing an image extraction on the image to convert the extracted image into a first circuit design file. A standard image is selected to convert into a second circuit design file, and then the standard image and at least one target in the image are compared to obtain a difference therebetween. According to the difference, at least one data of the surface structure may be made, wherein the data is selected from one of line edge roughness (LER), line width roughness (LWR), contact edge roughness (CER), critical dimension (CD), bias, 3 sigma, maximum, minimum, etc. and repeating defect."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method for measuring and analyzing surface structure of chip or wafer","description":"A method for measuring a surface structure of a chip or a wafer is provided that includes obtaining an image of the surface structure of the chip, and then performing an image extraction on the image ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9589086","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9589086","citation_suggestion":"Patentable. \"Method for measuring and analyzing surface structure of chip or wafer\" (US-9589086). https://patentable.app/patents/US-9589086","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9589086","json":"https://patentable.app/api/llm-context/US-9589086","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:42:50.548Z"}