{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9589798","patent":{"patent_number":"US-9589798","title":"Method of making a semiconductor device using a barrier and antireflective coating (BARC) layer","assignee":null,"inventors":[],"filing_date":"2015-09-30T00:00:00.000Z","publication_date":"2017-03-07T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":20,"abstract":"A method of forming a semiconductor device includes forming a dielectric layer over a substrate. The method includes forming a layer set over the dielectric layer, wherein the layer set comprises a plurality of layers. The method further includes forming a bottom antireflective coating (BARC) layer over the layer set. The method further includes etching the layer set to form a tapered opening in the layer set, wherein etching the layer set comprises etching at least one layer comprising a silicon-rich photoresist material layer and a second material layer different from the silicon-rich photoresist material, and the tapered opening has sidewalls at an angle with respect to a top surface of the dielectric layer. The method further includes etching the dielectric layer using the layer set as a mask to form an opening in the dielectric layer, wherein etching the dielectric layer comprises reducing a thickness of the layer set."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of making a semiconductor device using a barrier and antireflective coating (BARC) layer","description":"A method of forming a semiconductor device includes forming a dielectric layer over a substrate. The method includes forming a layer set over the dielectric layer, wherein the layer set comprises a pl","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9589798","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9589798","citation_suggestion":"Patentable. \"Method of making a semiconductor device using a barrier and antireflective coating (BARC) layer\" (US-9589798). https://patentable.app/patents/US-9589798","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9589798","json":"https://patentable.app/api/llm-context/US-9589798","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T19:49:55.618Z"}