{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9589845","patent":{"patent_number":"US-9589845","title":"Fin cut enabling single diffusion breaks","assignee":null,"inventors":[],"filing_date":"2016-05-23T00:00:00.000Z","publication_date":"2017-03-07T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":20,"abstract":"A method is provided for forming a fin cut that enables a single diffusion break in very dense CMOS structures formed using bulk semiconductor substrates. A dummy gate is removed from a finned structure to expose the top regions of the fins, the bottom fin regions being within a shallow trench isolation region. Selective vapor phase etching follows sequential ion implantation of the top and bottom fin regions to form a diffusion break cut region. The non-implanted regions of the substrate and the shallow trench isolation region remain substantially intact during each etching procedure. Double diffusion break cut regions are also enabled by the method."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Fin cut enabling single diffusion breaks","description":"A method is provided for forming a fin cut that enables a single diffusion break in very dense CMOS structures formed using bulk semiconductor substrates. A dummy gate is removed from a finned structu","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9589845","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9589845","citation_suggestion":"Patentable. \"Fin cut enabling single diffusion breaks\" (US-9589845). https://patentable.app/patents/US-9589845","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9589845","json":"https://patentable.app/api/llm-context/US-9589845","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:52:43.024Z"}