{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9589958","patent":{"patent_number":"US-9589958","title":"Pitch scalable active area patterning structure and process for multi-channel finFET technologies","assignee":null,"inventors":[],"filing_date":"2016-01-22T00:00:00.000Z","publication_date":"2017-03-07T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":16,"abstract":"A method is disclosed which cuts hard mask fins thinner than the target fin critical dimension and then enlarges the dimension of the fin hard mask critical dimension to meet the target fin critical dimension."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Pitch scalable active area patterning structure and process for multi-channel finFET technologies","description":"A method is disclosed which cuts hard mask fins thinner than the target fin critical dimension and then enlarges the dimension of the fin hard mask critical dimension to meet the target fin critical d","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9589958","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9589958","citation_suggestion":"Patentable. \"Pitch scalable active area patterning structure and process for multi-channel finFET technologies\" (US-9589958). https://patentable.app/patents/US-9589958","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9589958","json":"https://patentable.app/api/llm-context/US-9589958","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T13:38:33.894Z"}