{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9590072","patent":{"patent_number":"US-9590072","title":"Method of forming semiconductor device","assignee":null,"inventors":[],"filing_date":"2016-01-08T00:00:00.000Z","publication_date":"2017-03-07T00:00:00.000Z","cpc_codes":["H01L"],"num_claims":12,"abstract":"The present invention provides a method of forming a semiconductor device including following steps. Firstly, a fin shaped structure is formed on a substrate, and a gate structure is formed to be across the fin shaped structure. Next, a dielectric layer is formed on the substrate, covering the gate structure, and a gate electrode of the gate structure is removed, to form a first gate trench. Then, a threshold voltage implantation process and a compensated threshold voltage implantation process are sequentially performed in the first gate trench, to implant compensated two dopants respectively. Following these, a work function layer and a conductive layer are formed to fill the first gate trench."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Method of forming semiconductor device","description":"The present invention provides a method of forming a semiconductor device including following steps. Firstly, a fin shaped structure is formed on a substrate, and a gate structure is formed to be acro","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9590072","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9590072","citation_suggestion":"Patentable. \"Method of forming semiconductor device\" (US-9590072). https://patentable.app/patents/US-9590072","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9590072","json":"https://patentable.app/api/llm-context/US-9590072","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:23:35.939Z"}