{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9593009","patent":{"patent_number":"US-9593009","title":"Apparatus comprising and a method for manufacturing an embedded MEMS device","assignee":null,"inventors":[],"filing_date":"2014-10-15T00:00:00.000Z","publication_date":"2017-03-14T00:00:00.000Z","cpc_codes":["H01L","H01L","H04R","H04R","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H01L","H04R"],"num_claims":23,"abstract":"A system and a method for forming a packaged MEMS device are disclosed. In one embodiment a packaged MEMS device includes a MEMS device having a first main surface with a first area along a first direction and a second direction, a membrane disposed on the first main surface of the MEMS device and a backplate adjacent to the membrane. The packaged MEMS device further includes an encapsulation material that encapsulates the MEMS device and that defines a back volume, the back volume having a second area along the first direction and the second direction, wherein the first area is smaller than the second area."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus comprising and a method for manufacturing an embedded MEMS device","description":"A system and a method for forming a packaged MEMS device are disclosed. In one embodiment a packaged MEMS device includes a MEMS device having a first main surface with a first area along a first dire","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9593009","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9593009","citation_suggestion":"Patentable. \"Apparatus comprising and a method for manufacturing an embedded MEMS device\" (US-9593009). https://patentable.app/patents/US-9593009","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9593009","json":"https://patentable.app/api/llm-context/US-9593009","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:33:31.908Z"}