{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9593940","patent":{"patent_number":"US-9593940","title":"Optical measuring methods and apparatus","assignee":null,"inventors":[],"filing_date":"2015-04-28T00:00:00.000Z","publication_date":"2017-03-14T00:00:00.000Z","cpc_codes":["G01N","G01N"],"num_claims":19,"abstract":"In an optical measuring method, a first spectrum and a second spectrum are obtained from a pattern and a thin layer formed on the pattern by a deposition process using an ellipsometer respectively. A skew spectrum is obtained between the first spectrum and the second spectrum. A fourier transform operation is performed on the skew spectrum to calculate a thickness of the thin layer on the pattern."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Optical measuring methods and apparatus","description":"In an optical measuring method, a first spectrum and a second spectrum are obtained from a pattern and a thin layer formed on the pattern by a deposition process using an ellipsometer respectively. A ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9593940","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9593940","citation_suggestion":"Patentable. \"Optical measuring methods and apparatus\" (US-9593940). https://patentable.app/patents/US-9593940","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9593940","json":"https://patentable.app/api/llm-context/US-9593940","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T14:40:36.385Z"}