{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9594035","patent":{"patent_number":"US-9594035","title":"Silicon germanium thickness and composition determination using combined XPS and XRF technologies","assignee":null,"inventors":[],"filing_date":"2015-04-20T00:00:00.000Z","publication_date":"2017-03-14T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N","G01N","G01N"],"num_claims":10,"abstract":"Systems and approaches for silicon germanium thickness and composition determination using combined XPS and XRF technologies are described. In an example, a method for characterizing a silicon germanium film includes generating an X-ray beam. A sample is positioned in a pathway of said X-ray beam. An X-ray photoelectron spectroscopy (XPS) signal generated by bombarding said sample with said X-ray beam is collected. An X-ray fluorescence (XRF) signal generated by bombarding said sample with said X-ray beam is also collected. Thickness or composition, or both, of the silicon germanium film is determined from the XRF signal or the XPS signal, or both."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Silicon germanium thickness and composition determination using combined XPS and XRF technologies","description":"Systems and approaches for silicon germanium thickness and composition determination using combined XPS and XRF technologies are described. In an example, a method for characterizing a silicon germani","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9594035","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9594035","citation_suggestion":"Patentable. \"Silicon germanium thickness and composition determination using combined XPS and XRF technologies\" (US-9594035). https://patentable.app/patents/US-9594035","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9594035","json":"https://patentable.app/api/llm-context/US-9594035","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:10:58.081Z"}