{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9594310","patent":{"patent_number":"US-9594310","title":"Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method","assignee":null,"inventors":[],"filing_date":"2014-07-18T00:00:00.000Z","publication_date":"2017-03-14T00:00:00.000Z","cpc_codes":["G01N","G01N","G01N","G01N"],"num_claims":20,"abstract":"The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured. The intensity of each of the first diffraction orders from the diffraction spectrum are compared to determine overlay (or other properties) of exposed layers on the substrate."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method","description":"The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negativ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9594310","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9594310","citation_suggestion":"Patentable. \"Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method\" (US-9594310). https://patentable.app/patents/US-9594310","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9594310","json":"https://patentable.app/api/llm-context/US-9594310","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T12:30:23.746Z"}