{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9595094","patent":{"patent_number":"US-9595094","title":"Measuring form changes of a substrate","assignee":null,"inventors":[],"filing_date":"2011-11-14T00:00:00.000Z","publication_date":"2017-03-14T00:00:00.000Z","cpc_codes":["G06T","H01L"],"num_claims":13,"abstract":"The present invention relates to a device and method for determining changes in the shape of a substrate parallel to its substrate surface. The device comprises    The device is able to determine distances (dx1, dy1, dx2, dy2, dxn, dyn) of images of the structures and/or changes of the distances (dx1, dy1, dx2, dy2, dxn, dyn)."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Measuring form changes of a substrate","description":"The present invention relates to a device and method for determining changes in the shape of a substrate parallel to its substrate surface. The device comprises    The device is able to determine dist","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9595094","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9595094","citation_suggestion":"Patentable. \"Measuring form changes of a substrate\" (US-9595094). https://patentable.app/patents/US-9595094","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9595094","json":"https://patentable.app/api/llm-context/US-9595094","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T13:18:11.255Z"}