{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9595539","patent":{"patent_number":"US-9595539","title":"Array substrates and the manufacturing method thereof, and display panels of enhanced speed of film formation","assignee":null,"inventors":[],"filing_date":"2015-07-10T00:00:00.000Z","publication_date":"2017-03-14T00:00:00.000Z","cpc_codes":["H01L","H01L","G02F","G02F","G02F","G02F","G02F"],"num_claims":3,"abstract":"The present disclosure relates to an array substrate and the manufacturing method thereof, and a display panel. The array substrate includes a substrate and a plurality of thin film transistors (TFTs). The TFT includes a gate, a gate insulation layer, a trench layer, an etch stop layer (ESL), a source, and a drain. The gate insulation layer is arranged between the gate and the trench layer to insulate the gate from the trench layer, the source. The drain and the ESL are respectively arranged on the trench layer. The ESL is arranged between the source and the drain. The ESL is an aluminum nitride (AlN) film. In this way, the quality of the TFTs may be guaranteed, and the speed of the film formation of the ESL may be enhanced."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Array substrates and the manufacturing method thereof, and display panels of enhanced speed of film formation","description":"The present disclosure relates to an array substrate and the manufacturing method thereof, and a display panel. The array substrate includes a substrate and a plurality of thin film transistors (TFTs)","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9595539","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9595539","citation_suggestion":"Patentable. \"Array substrates and the manufacturing method thereof, and display panels of enhanced speed of film formation\" (US-9595539). https://patentable.app/patents/US-9595539","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9595539","json":"https://patentable.app/api/llm-context/US-9595539","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T08:04:01.951Z"}