{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9597734","patent":{"patent_number":"US-9597734","title":"Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof","assignee":null,"inventors":[],"filing_date":"2014-11-06T00:00:00.000Z","publication_date":"2017-03-21T00:00:00.000Z","cpc_codes":["B23Q","H01L"],"num_claims":11,"abstract":"Embodiments of the present disclosure generally provide chamber components with enhanced thermal properties and methods of enhancing thermal properties of chamber components including bonding materials. One embodiment of the present disclosure provides a method for fabricating a composite structure. The method includes applying a bonding material to a first component, and converting the bonding material applied to the first component to an enhanced bonding layer by heating the bonding material to outgas volatile species from the bonding material. The outgassed volatile species accumulates to at least 0.05% in mass of the bonding material. The method further includes contacting a second component and the enhanced bonding layer to join the first and second components."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof","description":"Embodiments of the present disclosure generally provide chamber components with enhanced thermal properties and methods of enhancing thermal properties of chamber components including bonding material","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9597734","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9597734","citation_suggestion":"Patentable. \"Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereof\" (US-9597734). https://patentable.app/patents/US-9597734","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9597734","json":"https://patentable.app/api/llm-context/US-9597734","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:04:34.817Z"}