{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9597933","patent":{"patent_number":"US-9597933","title":"Micro electro mechanical system, semiconductor device, and manufacturing method thereof","assignee":null,"inventors":[],"filing_date":"2015-06-04T00:00:00.000Z","publication_date":"2017-03-21T00:00:00.000Z","cpc_codes":["A61B","H01L","H01L","H01L","H01L","H01L","H01L","H01L","A61B","H01L","H01L","H01L","H01L","H01L","H01L"],"num_claims":19,"abstract":"The present invention provides a MEMS and a sensor having the MEMS which can be formed without a process of etching a sacrifice layer. The MEMS and the sensor having the MEMS are formed by forming an interspace using a spacer layer. In the MEMS in which an interspace is formed using a spacer layer, a process for forming a sacrifice layer and an etching process of the sacrifice layer are not required. As a result, there is no restriction on the etching time, and thus the yield can be improved."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Micro electro mechanical system, semiconductor device, and manufacturing method thereof","description":"The present invention provides a MEMS and a sensor having the MEMS which can be formed without a process of etching a sacrifice layer. The MEMS and the sensor having the MEMS are formed by forming an ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9597933","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9597933","citation_suggestion":"Patentable. \"Micro electro mechanical system, semiconductor device, and manufacturing method thereof\" (US-9597933). https://patentable.app/patents/US-9597933","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9597933","json":"https://patentable.app/api/llm-context/US-9597933","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T07:02:38.891Z"}