{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9599667","patent":{"patent_number":"US-9599667","title":"Visible light laser voltage probing on thinned substrates","assignee":null,"inventors":[],"filing_date":"2015-08-26T00:00:00.000Z","publication_date":"2017-03-21T00:00:00.000Z","cpc_codes":["G01N","H01L","G01N","H01L"],"num_claims":20,"abstract":"The various technologies presented herein relate to utilizing visible light in conjunction with a thinned structure to enable characterization of operation of one or more features included in an integrated circuit (IC). Short wavelength illumination (e.g., visible light) is applied to thinned samples (e.g., ultra-thinned samples) to achieve a spatial resolution for laser voltage probing (LVP) analysis to be performed on smaller technology node silicon-on-insulator (SOI) and bulk devices. Thinning of a semiconductor material included in the IC (e.g., backside material) can be controlled such that the thinned semiconductor material has sufficient thickness to enable operation of one or more features comprising the IC during LVP investigation."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Visible light laser voltage probing on thinned substrates","description":"The various technologies presented herein relate to utilizing visible light in conjunction with a thinned structure to enable characterization of operation of one or more features included in an integ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9599667","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9599667","citation_suggestion":"Patentable. \"Visible light laser voltage probing on thinned substrates\" (US-9599667). https://patentable.app/patents/US-9599667","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9599667","json":"https://patentable.app/api/llm-context/US-9599667","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T10:40:03.453Z"}