{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9601390","patent":{"patent_number":"US-9601390","title":"Silicon germanium fin formation via condensation","assignee":null,"inventors":[],"filing_date":"2015-12-04T00:00:00.000Z","publication_date":"2017-03-21T00:00:00.000Z","cpc_codes":["H01L","H01L","H01L"],"num_claims":18,"abstract":"A method of forming a finFET device comprises forming a fin in a silicon layer of a substrate, forming a hardmask layer on a top surface of the fin, forming an insulating layer over the fin and the hardmask layer, removing a portion of the insulating layer to expose a portion of the hardmask layer, removing the exposed portion of the hardmask layer to form a cavity that exposes a portion of the silicon layer of the fin, epitaxially growing a silicon germanium (SiGe) material on exposed portions of the silicon layer of the fin in the cavity, and annealing the grown SiGe to drive germanium atoms into the silicon layer of the fin."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Silicon germanium fin formation via condensation","description":"A method of forming a finFET device comprises forming a fin in a silicon layer of a substrate, forming a hardmask layer on a top surface of the fin, forming an insulating layer over the fin and the ha","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9601390","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9601390","citation_suggestion":"Patentable. \"Silicon germanium fin formation via condensation\" (US-9601390). https://patentable.app/patents/US-9601390","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9601390","json":"https://patentable.app/api/llm-context/US-9601390","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T05:49:28.911Z"}