{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9601394","patent":{"patent_number":"US-9601394","title":"Substrate processing apparatus, substrate processing method and memory medium","assignee":null,"inventors":[],"filing_date":"2015-02-26T00:00:00.000Z","publication_date":"2017-03-21T00:00:00.000Z","cpc_codes":["G05B","G05B","G05B","H01L","H01L","H01L","H01L","H01L","H01L","H01L","G05B","G05B"],"num_claims":5,"abstract":"A substrate processing system includes a film-forming device to form photosensitive film on substrate, an exposure device to expose the film on the substrate, a relay device to transfer the substrate between the film-forming and exposure devices, a warping data acquisition device to acquire measured warping data of the substrate, a communication device to perform data communication with the exposure device, and a control device including film-forming, relay, measuring, and communication control sub-devices. The film-forming sub-device controls the film-forming device to form the film on the substrate, the relay sub-device controls the relay device to transfer the substrate to the exposure device, the measuring sub-device controls the warping data acquisition device to acquire the data after the controlling by the film-forming sub-device prior to the controlling by the relay sub-device, and the communication sub-device controls the communication device to transmit the data to the exposure device."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Substrate processing apparatus, substrate processing method and memory medium","description":"A substrate processing system includes a film-forming device to form photosensitive film on substrate, an exposure device to expose the film on the substrate, a relay device to transfer the substrate ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9601394","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9601394","citation_suggestion":"Patentable. \"Substrate processing apparatus, substrate processing method and memory medium\" (US-9601394). https://patentable.app/patents/US-9601394","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9601394","json":"https://patentable.app/api/llm-context/US-9601394","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T11:16:50.760Z"}