{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9601482","patent":{"patent_number":"US-9601482","title":"Economical and environmentally friendly chemical mechanical polishing for III-V compound semiconductor device fabrication","assignee":null,"inventors":[],"filing_date":"2015-12-08T00:00:00.000Z","publication_date":"2017-03-21T00:00:00.000Z","cpc_codes":["H01L","H01L"],"num_claims":20,"abstract":"Compound semiconductor devices and methods for fabricating compound semiconductor devices (e.g., III-V devices) based on aspect ratio trapping are provided in which economical and environmentally friendly chemical mechanical polishing techniques are implemented to minimize waste of, e.g., III-V precursor material, minimize production costs, and minimize environmental impact from toxic waste generated from chemical mechanical polishing of III-V films."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Economical and environmentally friendly chemical mechanical polishing for III-V compound semiconductor device fabrication","description":"Compound semiconductor devices and methods for fabricating compound semiconductor devices (e.g., III-V devices) based on aspect ratio trapping are provided in which economical and environmentally frie","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9601482","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9601482","citation_suggestion":"Patentable. \"Economical and environmentally friendly chemical mechanical polishing for III-V compound semiconductor device fabrication\" (US-9601482). https://patentable.app/patents/US-9601482","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9601482","json":"https://patentable.app/api/llm-context/US-9601482","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T09:15:41.585Z"}