{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9602780","patent":{"patent_number":"US-9602780","title":"Apparatus for inspecting defect with time/spatial division optical system","assignee":null,"inventors":[],"filing_date":"2011-11-02T00:00:00.000Z","publication_date":"2017-03-21T00:00:00.000Z","cpc_codes":["H04N","G01N","G01N","G01N","H01L","H01L"],"num_claims":27,"abstract":"In a defect inspecting apparatus, the strength of a fatal defect signal decreases due to miniaturization. Thus, in order to assure a high SN ratio, it is necessary to reduce noises caused by scattered light from a wafer. Roughness of a pattern edge and surface roughness which serve as a scattered-light source are spread over the entire wafer. The present invention has discovered the fact that reduction of an illuminated area is a technique effective for decreasing noises. That is to say, the present invention has discovered the fact that creation of an illuminated area having a spot shape and reduction of the dimension of a spot beam are effective. A plurality of temporally and spatially divided spot beams are radiated to the wafer serving as a sample."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Apparatus for inspecting defect with time/spatial division optical system","description":"In a defect inspecting apparatus, the strength of a fatal defect signal decreases due to miniaturization. Thus, in order to assure a high SN ratio, it is necessary to reduce noises caused by scattered","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9602780","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9602780","citation_suggestion":"Patentable. \"Apparatus for inspecting defect with time/spatial division optical system\" (US-9602780). https://patentable.app/patents/US-9602780","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9602780","json":"https://patentable.app/api/llm-context/US-9602780","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T16:52:26.671Z"}