{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9605985","patent":{"patent_number":"US-9605985","title":"Flow rate measuring mechanism, mass flow controller, and pressure sensor","assignee":null,"inventors":[],"filing_date":"2010-09-17T00:00:00.000Z","publication_date":"2017-03-28T00:00:00.000Z","cpc_codes":["G05D"],"num_claims":5,"abstract":"The present invention is a flow rate measuring mechanism provided with: a body unit that has an internal flow path through which a target fluid to be measured is configured to flow; and a pressure sensor that is attached to the body unit and senses a pressure of the internal flow path, and configured to calculate a flow rate of the fluid on the basis of the fluid pressure sensed by the pressure sensor, wherein the body unit has a length direction and a surface parallel to the length direction, which is set as a component attachment surface, and to the component attachment surface, the pressure sensor is attached such that a pressure sensitive surface thereof is substantially vertical to the component attachment surface and substantially parallel to the length direction, and thereby, without causing a reduction in pressure measurement sensitivity, makes a width direction size dramatically smaller than before."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Flow rate measuring mechanism, mass flow controller, and pressure sensor","description":"The present invention is a flow rate measuring mechanism provided with: a body unit that has an internal flow path through which a target fluid to be measured is configured to flow; and a pressure sen","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9605985","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9605985","citation_suggestion":"Patentable. \"Flow rate measuring mechanism, mass flow controller, and pressure sensor\" (US-9605985). https://patentable.app/patents/US-9605985","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9605985","json":"https://patentable.app/api/llm-context/US-9605985","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T06:37:12.078Z"}