{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9607371","patent":{"patent_number":"US-9607371","title":"Mesoscopic defect detection for reticle inspection","assignee":null,"inventors":[],"filing_date":"2014-03-27T00:00:00.000Z","publication_date":"2017-03-28T00:00:00.000Z","cpc_codes":["G06T","G06T","G06T","G06V"],"num_claims":20,"abstract":"In some embodiments, a method and/or system may include detecting defects in photomasks. The method may include acquiring a first image of a first die. The method may include acquiring a second image of a second die. In some embodiments, the method may include dividing the first and the second image into a number of first and second portions respectively. The method may include reducing one or more differences in sizing of the first and the second portions. In some embodiments, the method may include determining a difference in a function derived from an image intensity between the corresponding first and second portions. The method may include summing the differences in the function between the corresponding first and second portions. The method may include detecting mesoscopic scale defects in the second die."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Mesoscopic defect detection for reticle inspection","description":"In some embodiments, a method and/or system may include detecting defects in photomasks. The method may include acquiring a first image of a first die. The method may include acquiring a second image ","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9607371","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9607371","citation_suggestion":"Patentable. \"Mesoscopic defect detection for reticle inspection\" (US-9607371). https://patentable.app/patents/US-9607371","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9607371","json":"https://patentable.app/api/llm-context/US-9607371","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T04:10:47.237Z"}