{"schema_version":"1.0","canonical_url":"https://patentable.app/patents/US-9607389","patent":{"patent_number":"US-9607389","title":"Alignment apparatus","assignee":null,"inventors":[],"filing_date":"2015-09-17T00:00:00.000Z","publication_date":"2017-03-28T00:00:00.000Z","cpc_codes":["G06T","H01L","G06T","G06T","G06T"],"num_claims":8,"abstract":"An alignment apparatus for aligning a wafer by optically detecting an alignment mark includes an imaging unit configured to image an imaging region extending across a circumferential edge of the wafer, an irradiation unit configured to irradiate light toward the imaging region, a reflection part configured to reflect toward the imaging region the light that is irradiated from the irradiation unit upwardly, and a control unit configured to detect the circumferential edge. The reflection part has a reflectance making a luminance difference between the outside of the wafer and the circumferential edge of the wafer in a luminance distribution pattern obtained by imaging the imaging region. The control unit detects the alignment mark and the circumferential edge based on the luminance distribution pattern."},"analysis":{"summary":null,"layman_explanation":null,"technical_analysis":null,"business_analysis":null,"faqs":null,"topics":[],"tech_cluster":null},"seo":{"title":"Alignment apparatus","description":"An alignment apparatus for aligning a wafer by optically detecting an alignment mark includes an imaging unit configured to image an imaging region extending across a circumferential edge of the wafer","keywords":[]},"attribution":{"source":"Patentable","source_url":"https://patentable.app","canonical_url":"https://patentable.app/patents/US-9607389","license":"CC-BY-4.0-like","license_terms":"AI-generated analysis on this page (summary, layman_explanation, technical_analysis, business_analysis, faqs) may be reused with attribution and a visible link back to the canonical URL above. Patent abstracts, claims, and bibliographic data are USPTO public domain.","required_link":"https://patentable.app/patents/US-9607389","citation_suggestion":"Patentable. \"Alignment apparatus\" (US-9607389). https://patentable.app/patents/US-9607389","copyright_holder":"Nomic Interactive Technology LLC"},"links":{"html":"https://patentable.app/patents/US-9607389","json":"https://patentable.app/api/llm-context/US-9607389","site":"https://patentable.app","llms_txt":"https://patentable.app/llms.txt"},"generated_at":"2026-06-06T16:30:46.182Z"}